Author:
Sumino Koji,Yonenaga Ichiro,Yusa Atsushi
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Cited by
29 articles.
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1. Properties of silicon;Handbook of Silicon Based MEMS Materials and Technologies;2020
2. Ultrahigh sensitivity SIMS analysis of oxygen in silicon;Surface and Interface Analysis;2018-05-17
3. Investigation of Wafer Warpage Induced by Multi-layer Films;JOURNAL OF SEMICONDUCTOR TECHNOLOGY AND SCIENCE;2018-02-28
4. Single-Crystal Silicon: Growth and Properties;Springer Handbook of Electronic and Photonic Materials;2017
5. Properties of Silicon;Handbook of Silicon Based MEMS Materials and Technologies;2015