Disordering and anomalous surface erosion of GaN during ion bombardment at elevated temperatures
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1347010
Reference10 articles.
1. GaN: Processing, defects, and devices
2. Ion implantation of semiconductors
3. Ion implantation of semiconductors
4. Ion implantation of epitaxial GaN films: damage, doping and activation
5. Doping of GaN by Ion Implantation: Does it Work?
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