High-current microwave ion source for wide-energy-range O+ ion implantation
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1150355
Reference3 articles.
1. History of SIMOX Material
2. Evolution and Future Trends of SIMOX Material
3. Microwave ion sources for material processing (invited)
Cited by 5 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Development of an all-permanent-magnet microwave ion source equipped with multicusp magnetic fields for high current proton beam production;Review of Scientific Instruments;2008
2. Annealing Effect on Structural Defects in Low-Dose Separation-by-Implanted-Oxygen Wafers;Japanese Journal of Applied Physics;2006-10-06
3. Effect of implantation energy and dose on low-dose SIMOX structures;Applied Physics A;2005-11
4. Development of an electrostatic beam focus lens equipped with electron suppression grids for a microwave ion source to inject high-current ion beams into a linac;Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment;2005-09
5. Development of a high-current microwave ion source for proton linac application systems;Review of Scientific Instruments;2004-05
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