Structural transition in sputter-deposited amorphous germanium films by aging at ambient temperature-Reference-Cited by-同舟云学术

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Structural transition in sputter-deposited amorphous germanium films by aging at ambient temperature

Published:2016-06-06 Issue:21 Volume:119 Page:214309
ISSN:0021-8979
Container-title:Journal of Applied Physics
language:en
Short-container-title:J. Appl. Phys.

Author:

Okugawa M.¹^ORCID,Nakamura R.¹^ORCID,Ishimaru M.²,Watanabe K.²,Yasuda H.³,Numakura H.¹^ORCID

Affiliation:

1. Department of Materials Science, Graduate School of Engineering, Osaka Prefecture University, Gakuen-cho 1-1, Naka-ku, Sakai 599-8531, Japan

2. Department of Materials Science and Engineering, Kyushu Institute of Technology, Tobata, Kitakyushu, Fukuoka 804-8550, Japan

3. Research Center for Ultra-High Voltage Electron Microscopy, Osaka University, Mihogaoka 7-1, Ibaraki, Osaka 567-0047, Japan

Funder

Grant-in-Aid for Scientific Research (C) of the Ministry of Education, Culture, Sports, Science and Technology, Japan

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Reference33 articles.

1. Size-dependent near-infrared photoluminescence from Ge nanocrystals embedded inSiO2matrices

2. Quantum confinement in germanium nanocrystals

3. Optical properties of Ge and Si nanocrystallites fromab initiocalculations. II. Hydrogenated nanocrystallites

4. Ge nanocrystals in magnetron sputtered SiO2

5. Germanium n-type shallow junction activation dependences

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1. Solute atom mediated crystallization of amorphous alloys;Materialia;2023-12

2. Structural Inhomogeneity and Crystallization of Amorphous Thin Films of Group IV Semiconductors;Materia Japan;2022-07-01

3. Explosive crystallization of sputter-deposited amorphous germanium films by irradiation with an electron beam of SEM-level energies;Journal of Applied Physics;2021-06-01

4. Dual crystallization modes of sputter-deposited amorphous SiGe films;Journal of Applied Physics;2020-07-07

5. Effects of hydrogen on structure and crystallization behavior of sputter-deposited amorphous germanium films;Japanese Journal of Applied Physics;2020-07-01

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