Explosive crystallization of sputter-deposited amorphous germanium films by irradiation with an electron beam of SEM-level energies-Reference-Cited by-同舟云学术

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Explosive crystallization of sputter-deposited amorphous germanium films by irradiation with an electron beam of SEM-level energies

Published:2021-06-01 Issue:21 Volume:129 Page:215301
ISSN:0021-8979
Container-title:Journal of Applied Physics
language:en
Short-container-title:Journal of Applied Physics

Author:

Nakamura R.¹^ORCID,Matsumoto A.¹,Ishimaru M.²^ORCID

Affiliation:

1. Department of Materials Science, Graduate School of Engineering, Osaka Prefecture University, Gakuen-cho 1-1, Naka-ku, Sakai 599-8531, Japan

2. Department of Materials Science and Engineering, Kyushu Institute of Technology, Tobata, Kitakyushu, Fukuoka 804-8550, Japan

Funder

Murata Science Foundation

Japan Society for the Promotion of Science

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Link

https://aip.scitation.org/doi/pdf/10.1063/5.0052142

Reference31 articles.

1. High-performance poly-Ge short-channel metal–oxide–semiconductor field-effect transistors formed on SiO2layer by flash lamp annealing

2. High-hole mobility polycrystalline Ge on an insulator formed by controlling precursor atomic density for solid-phase crystallization

3. Germanium CMOS potential from material and process perspectives: Be more positive about germanium

4. Electrical properties of poly-Ge on glass substrate grown by two-step solid-phase crystallization

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1. Trigonal Fe₂Si Nanosheets at Fe/Amorphous SiO_x Interfaces for Spintronic Nanodevices;ACS Applied Nano Materials;2024-07-13

2. Formation of Germanium Nanocrystals and Amorphous Nanoclusters in GeO[SiO] and GeO[SiO2] Films Using Electron Beam Annealing;Technical Physics;2024-01

3. Explosive crystallization of amorphous germanium-tin films by irradiation with a 3-keV electron beam;Journal of Applied Physics;2023-05-12

4. Impact of supercooled liquid structures on the crystallization processes of amorphous Ge;Applied Physics Express;2022-12-19

5. Formation of germanium nanocrystals and amorphous nanoclusters in GeSiOx films using electron beam annealing;Vacuum;2022-03

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