The surface topography of Ag/Cu alloys sputtered by bombardment with 35–100‐keV argon ions
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.331359
Reference15 articles.
1. Cone Formation on Metal Targets during Sputtering
2. Alloy sputtering
3. Reduced Sputtering Yields for Two‐Phase Ag–Ni and Ag–Co Targets
4. The topography of sputtered semiconductors
5. Development of the surface topography on polycrystalline metals by ion bombardment investigated by scanning electron microscopy
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1. Multiparameter investigation of the sputtering behavior of Ag∕Cu Alloys for low energy argon ion bombardment;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;2008-05
2. Surface topography and sputtering behaviour of Cu–6Ag and Cu–1OSn in different plasma atmospheres;Materials Science and Technology;1998-05
3. Temperature dependence of the total sputtering yield of a two-phase () alloy for 200 eV Ar+ ions;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1998-01
4. Glow discharge and sputtering characteristics of copper alloys;Vacuum;1996-09
5. Atomic Collision on Surfaces and Material Implementation;Materials Science Forum;1996-05
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