Temperature dependence of the total sputtering yield of a two-phase () alloy for 200 eV Ar+ ions-Reference-Cited by-同舟云学术

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Temperature dependence of the total sputtering yield of a two-phase () alloy for 200 eV Ar+ ions

Published:1998-01 Issue:1 Volume:134 Page:13-21
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Pierson K.W.,Hawes C.D.,Krueger T.D.

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference40 articles.

1. Ion Implantation and Beam Processing;Andersen,1984

2. Sputtering from atomic-collision cascades

3. Sputtering by Particle Bombardment II;Betz,1983

4. Sputtering by Particle Bombardment III;Wittmaack,1991

5. Sputtering and transformation of one phase Cu-Ni alloy surfaces under ion bombardment

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Sputtering yield and nanopattern formation study of BNSiO2 (Borosil) at elevated temperature relevance to Hall Effect Thruster;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2022-03

2. Multiparameter investigation of the sputtering behavior of Ag∕Cu Alloys for low energy argon ion bombardment;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;2008-05

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