Multiparameter investigation of the sputtering behavior of Ag∕Cu Alloys for low energy argon ion bombardment
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Published:2008-05
Issue:3
Volume:26
Page:522-536
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ISSN:0734-2101
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Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
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language:en
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Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
Author:
Pierson K. W.,Hawes C. D.,Kollwitz J. T.,Padrón A. S.
Publisher
American Vacuum Society
Subject
Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics