Heavy metal gettering in silicon‐on‐insulator structures formed by oxygen implantation into silicon
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.335910
Reference6 articles.
1. Carrier lifetimes in silicon epitaxial layers deposited on oxygen-implanted substrates
2. Increased carrier lifetimes in epitaxial silicon layers on buried silicon nitride produced by ion implantation
3. Metal Impurities near the SiO2 ‐ Si Interface
4. The Top Silicon Layer of SOI Formed by Oxygen Ion Implantation
5. Effects of implantation temperature on the properties of buried oxide layers in silicon formed by oxygen ion implantation
Cited by 35 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Gettering and Passivation of Metals in Silicon and Germanium;Metal Impurities in Silicon- and Germanium-Based Technologies;2018
2. Excess oxygen limited diffusion and precipitation of iron in amorphous silicon dioxide;Journal of Applied Physics;2017-10-07
3. Gettering in silicon-on-insulator wafers: experimental studies and modelling;Semiconductor Science and Technology;2005-04-15
4. Cu gettering to nanovoids in SOI materials;Science in China Series E;2003
5. Arsenic Redistribution during Rapid Thermal Chemical Vapor Deposition of TiSi[sub 2] on Si;Journal of The Electrochemical Society;2001
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3