Ultra high density three dimensional capacitors based on Si nanowires array grown on a metal layer
Author:
Affiliation:
1. CEA, LETI, MINATEC Campus, 17 rue des Martyrs, 38054 Grenoble, France
2. LTM, CNRS, UJF-Grenoble 1, Grenoble INP, CEA, 17 rue des Martyrs, 38054 Grenoble, France
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Reference23 articles.
1. Highly Polarized Photoluminescence and Photodetection from Single Indium Phosphide Nanowires
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5. Three-dimensional 35 nF/mm/sup 2/ MIM capacitors integrated in BiCMOS technology
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