Formation of Ge nanocrystals in HfAlO high-k dielectric and application in memory device-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

Formation of Ge nanocrystals in HfAlO high-k dielectric and application in memory device

Published:2004-06-28 Issue:26 Volume:84 Page:5407-5409
ISSN:0003-6951
Container-title:Applied Physics Letters
language:en
Short-container-title:Appl. Phys. Lett.

Author:

Wang Ying Qian,Chen Jing Hao,Yoo Won Jong,Yeo Yee-Chia,Kim Sun Jung,Gupta Rohit,Tan Zerlinda Y. L.,Kwong Dim-Lee,Du An Yan,Balasubramanian N.

Publisher

AIP Publishing

Subject

Physics and Astronomy (miscellaneous)

Link

http://aip.scitation.org/doi/pdf/10.1063/1.1767597

Reference9 articles.

1. A Novel Approach of Fabricating Germanium Nanocrystals for Nonvolatile Memory Application

2. J. J. Lee, X. Wang, W. Bai, N. Lu, J. Liu, and D. L. Kwong, Proceedings of the VLSI Technol., Symposium, 2003, p 33.

3. Memory characterization of SiGe quantum dot flash memories with HfO/sub 2/ and SiO/sub 2/ tunneling dielectrics

4. Observation of memory effect in germanium nanocrystals embedded in an amorphous silicon oxide matrix of a metal–insulator– semiconductor structure

Cited by 54 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Fabrication and characterization of HfxAl(1-x)Oy ceramic targets and thin films by RF sputtering;Ceramics International;2024-09

2. Quantitative analysis of irregular channel shape effects on charge-trapping efficiency using massive 3D NAND data;Materials Science in Semiconductor Processing;2023-04

3. N2 gas flow rate dependence on the high-k LaB x N y thin film characteristics formed by RF sputtering for floating-gate memory applications;Japanese Journal of Applied Physics;2021-03-01

4. A Review on Ge Nanocrystals Embedded in SiO2and High-k Dielectrics;physica status solidi (a);2018-01-31

5. Carrier trapping and confinement in Ge nanocrystals surrounded by Ge3N4;Scientific Reports;2016-05

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP

Copyright © 2019-2024 北京同舟云网络信息技术有限公司
京公网安备11010802033243号京ICP备18003416号-3