Morphology of epitaxial TiN(001) grown by magnetron sputtering
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.118675
Reference17 articles.
1. Growth of epitaxial TiN films deposited on MgO(100) by reactive magnetron sputtering: The role of low-energy ion irradiation during deposition
2. Low‐energy (5
3. The roughening of metal surfaces
4. EXPERIMENTAL OBSERVATIONS OF SELF-AFFINE SCALING AND KINETIC ROUGHENING AT SUB-MICRON LENGTHSCALES
5. Surface Morphology during Multilayer Epitaxial Growth of Ge(001)
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