A combined molecular dynamics/Monte Carlo simulation of Cu thin film growth on TiN substrates: Illustration of growth mechanisms and comparison with experiments

Author:

Namakian Reza,Novak Brian R.,Zhang Xiaoman,Meng Wen Jin,Moldovan Dorel

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry

Reference73 articles.

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