Mono‐ and disilicon radicals in silane and silane‐argon dc discharges
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.336806
Reference39 articles.
1. Growth and defect chemistry of amorphous hydrogenated silicon
2. Radical species in argon‐silane discharges
3. Decomposition kinetics of a static direct current silane glow discharge
4. Mechanism of the direct current plasma discharge decomposition of disilane
5. Emission cross sections from fragments produced by electron impact on silane
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