Low-temperature crystallization of amorphous silicon using atomic hydrogen generated by catalytic reaction on heated tungsten
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.123782
Reference8 articles.
1. Control of crystallinity of microcrystalline silicon film grown on insulating glass substrates
2. Amorphous silicon produced by a new thermal chemical vapor deposition method using intermediate species SiF2
3. Silicon nitride produced by catalytic chemical vapor deposition method
4. Low-temperature nitridation of silicon surface using NH3-decomposed species in a catalytic chemical vapor deposition system
5. Formation of Polysilicon Films by Catalytic Chemical Vapor Deposition (cat-CVD) Method
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