Quantitative nanoscale local strain profiling in embedded SiGe metal-oxide-semiconductor structures
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2738188
Reference16 articles.
1. Extremely high electron mobility in Si/GexSi1−xstructures grown by molecular beam epitaxy
2. Uniaxial-process-induced strained-Si: extending the CMOS roadmap
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