Plan‐view transmission electron diffraction measurement of roughness at buried Si/SiO2interfaces
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.102280
Reference16 articles.
1. The Si–SiO2 interface: Correlation of atomic structure and electrical properties
2. Surface roughness at the Si(100)-SiO2interface
3. A high‐resolution electron microscopy study of the Si‐SiO2interface
4. Computer simulation of high‐resolution transmission electron microscopy images of Si/SiO2interfaces
5. Improving Signal-to-Noise Limits in High Resolution Transmission Electron Microscopy
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