Improving Signal-to-Noise Limits in High Resolution Transmission Electron Microscopy

Abstract

ABSTRACTSignal-to-noise ratios for Si <110> lattice images are measured for a variety of different specimen preparation techniques, including ion-milling, chemical polishing, cleavage and in-situ surface cleaning by heating. The noise levels are significantly lower in the latter, possibly permitting new classes of experiments in image quantitation and impurity imaging.