Plasma chemistry at long mean‐free‐paths
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.356341
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2. Kinetic description of flow past a micro-plate;Journal of Computational Physics;2004-04
3. Three-dimensional solutions of the Boltzmann equation: Heat transport at long mean free paths;Physical Review E;2002-05-22
4. Modeling the kinetics of neutral particles in low-pressure chemically active planar microwave plasmas;Journal of Applied Physics;1998-10-15
5. Self-consistent particle simulation of radio-frequency CF4 discharge with implementation of all ion–neutral reactive collisions;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;1998-05
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