Using Fourier transform infrared absorption spectrometry to probe the injected neutral gas in a plasma having a high ionization fraction

Author:

Goeckner M. J.,Breun R. A.

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Cited by 19 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Fourier transform infrared spectroscopy of trifluoroiodomethane plasma;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;2017-11

2. In situ IR Spectroscopy as a Tool to Better Understand the Growth Mechanisms of Plasma Polymers Thin Films;Plasma Processes and Polymers;2015-05-26

3. Experimental and Theoretical Study of the Plasma Chemistry of Ethyl Lactate Plasma Polymerization Discharges;Plasma Processes and Polymers;2014-12-09

4. Electron beam excitation method to study gas phase during etch processes;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2012-07

5. Time resolved studies on pulsed fluorocarbon plasmas using chirped quantum cascade lasers;Journal of Physics D: Applied Physics;2010-03-11

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