Measurements of the presheath in an electron cyclotron resonance etching device
Author:
Publisher
IOP Publishing
Subject
Condensed Matter Physics
Reference11 articles.
1. Laser‐induced fluorescence measurements of transverse ion temperature in an electron cyclotron resonance plasma
2. Microwave Plasma Etching
3. Plasma sheath thickness in radio‐frequency discharges
4. The Bohm criterion and sheath formation
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