Dose thresholds for implantation of iron‐doped indium phosphide
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.329157
Reference8 articles.
1. Ion‐implantedn‐ andp‐type layers in InP
2. InP growth and properties
3. Implantation and PH 3 Ambient Annealing of InP
4. Thermal degradation of InP and its control in LPE growth
5. Indium Phosphide
Cited by 7 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Electrical and optical characterisation of silicon and silicon/phosphorus implantsin InP doped with iron;Materials Science and Technology;1995-11
2. Effects of background Fe concentrations in the annealing of ion‐implanted Si into InP substrates for InP metal‐insulator‐semiconductor field‐effect transistor applications;Journal of Applied Physics;1989-08-15
3. Ion Implantation in Iii–V Semiconductors;Materials Processing: Theory and Practices;1989
4. Capless annealing of InP for metal‐insulator‐semiconductor field‐effect transistor applications;Applied Physics Letters;1984-09
5. An 800-MHz insulated gate buried-channel CCD on InP;IEEE Electron Device Letters;1984-08
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