Morphology and electrical conduction of Si:P δ-doped layers on vicinal Si(001)
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2977750
Reference24 articles.
1. Nanoscale electronics based on two-dimensional dopant patterns in silicon
2. Realization of Atomically Controlled Dopant Devices in Silicon
3. Ohmic conduction of sub-10nm P-doped silicon nanowires at cryogenic temperatures
4. Weak localization and hole-hole interaction effects in silicon-boron delta layers
5. Low-temperature electron transport in Si with an MBE-grown Sb δ layer
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