Epitaxial growth of AlN thin films on silicon (111) substrates by pulsed laser deposition
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.359441
Reference25 articles.
1. GaN, AlN, and InN: A review
2. Epitaxial growth and piezoelectric properties of A1N, GaN, and GaAs on sapphire or spinel
3. Disk hydrogen plasma assisted chemical vapor deposition of aluminum nitride
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