Disk hydrogen plasma assisted chemical vapor deposition of aluminum nitride
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.99398
Reference16 articles.
1. Hydrogen plasma etching of semiconductors and their oxides
2. Plasma‐assisted epitaxial growth of GaSb in hydrogen plasma
3. Hydrogenation of GaAs on Si: Effects on diode reverse leakage current
4. Hydrogenation of GaAs on Si: Effects on diode reverse leakage current
5. Photodeposition of metal films with ultraviolet laser light
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