Spatial profiles of reactive intermediates in rf silane discharges
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.343915
Reference23 articles.
1. Optical diagnostics of low pressure plasmas
2. Neutral radical detection in silane glow-discharge plasma using coherent anti-stokes raman spectroscopy
3. Laser-induced fluorescence of the SiH2 radical
4. Production mechanism and reactivity of the SiH radical in a silane plasma
5. Spatial concentrations of silicon atoms by laser‐induced fluorescence in a silane glow discharge
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