Oxygen atomic flux O* enhancement by gas-pulsed electron cyclotron resonance plasma
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.364263
Reference12 articles.
1. Insituepitaxial growth of Y1Ba2Cu3O7−xfilms by molecular beam epitaxy with an activated oxygen source
2. The Irradiation Effects of an Oxygen Radical Beam on the Preparation of Superconducting Thin Films
3. Effects of electron cyclotron resonance plasma thermal oxidation on the properties of polycrystalline silicon film
4. Radical-Beam-Induced Surface Reaction Processes of Porous Si
5. Review of plane grating focusing for soft x‐ray monochromators
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