Interaction of oxygen with polystyrene and polyethylene polymer films: A mechanistic study-Reference-Cited by-同舟云学术

Interaction of oxygen with polystyrene and polyethylene polymer films: A mechanistic study

Published:2020-01-14 Issue:2 Volume:127 Page:023303
ISSN:0021-8979
Container-title:Journal of Applied Physics
language:en
Short-container-title:Journal of Applied Physics

Author:

Fukunaga Yusuke¹,Longo Roberto C.²^ORCID,Ventzek Peter L. G.²,Lane Barton²,Ranjan Alok²,Hwang Gyeong S.³^ORCID,Hartmann Gregory³,Tsutsumi Takayoshi¹,Ishikawa Kenji¹^ORCID,Kondo Hiroki¹^ORCID,Sekine Makoto¹,Hori Masaru¹

Affiliation:

1. Department of Electrical Engineering and Computer Science, Nagoya University, Nagoya 464-8603, Japan

2. Tokyo Electron America, Inc., 2400 Grove Blvd., Austin, Texas 78741, USA

3. McKetta Department of Chemical Engineering, The University of Texas at Austin, Austin, Texas 78712, USA

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Link

http://aip.scitation.org/doi/pdf/10.1063/1.5127863

Reference41 articles.

1. Pressure and input power dependence of Ar/N2H2 inductively coupled plasma systems

2. Behavior of atomic radicals and their effects on organic low dielectric constant film etching in high density N2/H2 and N2/NH3 plasmas

3. Chemical bond modification in porous SiOCH films by H2 and H2/N2 plasmas investigated by in situ infrared reflection absorption spectroscopy

4. H2/N2 plasma damage on porous dielectric SiOCH film evaluated by in situ film characterization and plasma diagnostics

5. Feature Profiles on Plasma Etch of Organic Films by a Temporal Control of Radical Densities and Real-Time Monitoring of Substrate Temperature

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