Suppression mechanisms for oxidation stacking faults in silicon on insulator
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.351202
Reference22 articles.
1. Historical overview of SIMOX
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3. Formation of stacking faults and enhanced diffusion in the oxidation of silicon
4. Oxidation induced stacking faults inn‐ andp‐type (100) silicon
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