Design of a four-degree-of-freedom nano positioner utilizing electromagnetic actuators and flexure mechanisms
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4908128
Reference23 articles.
1. Design and Modeling of a High-Speed AFM-Scanner
2. High-speed serial-kinematic SPM scanner: design and drive considerations
3. Design of a low-cost nano-manipulator which utilizes a monolithic, spatial compliant mechanism
4. Flexural-hinge guided motion nanopositioner stage for precision machining: finite element simulations
5. Design and Control of a Three-Axis Serial-Kinematic High-Bandwidth Nanopositioner
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