Flexural-hinge guided motion nanopositioner stage for precision machining: finite element simulations
Author:
Publisher
Elsevier BV
Subject
General Engineering
Reference10 articles.
1. Piezoelectric actuator based active error compensation of precision machining;Xu;Meas Sci Technol,1999
2. Flexure hinges for piezoactuator displacement amplifiers;Xu;Prec Eng,1996
3. Nanometer positioning of a linear motion stage under static loads;Awabdy;IEEE Trans Mechatronics,1998
4. Waviness compensation of precision machining by piezo-electric micro cutting device;Kim;Int J Mach Tools Manufact,1998
5. Long-range AFM profiler used for accurate pitch measurements;Meli;Meas Sci Technol,1998
Cited by 38 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Kinematic Calibration of a 3DOF Compliant Nanopositioning Stage Based on Visual Measurement;2023 International Conference on Manipulation, Automation and Robotics at Small Scales (MARSS);2023-10-09
2. An Integrated Structure-Control Optimization Method for Rigid-Flexible Coupling Positioning Stage;Advances in Mechanical Design;2022
3. Design and stiffness modeling of a four-degree-of-freedom nanopositioning stage based on six-branched-chain compliant parallel mechanisms;Review of Scientific Instruments;2020-06-01
4. Design and Analysis of a Flexure-Based Parallel XY Stage Driven by Differential Piezo Forces;International Journal of Precision Engineering and Manufacturing;2020-05-20
5. Parameters Optimization and Experiment of A Planar Parallel 3-DOF Nanopositioning System;IEEE Transactions on Industrial Electronics;2018-03
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3