Design and Analysis of a Flexure-Based Parallel XY Stage Driven by Differential Piezo Forces-Reference-Cited by-同舟云学术

Design and Analysis of a Flexure-Based Parallel XY Stage Driven by Differential Piezo Forces

Published:2020-05-20 Issue:8 Volume:21 Page:1547-1561
ISSN:2234-7593
Container-title:International Journal of Precision Engineering and Manufacturing
language:en
Short-container-title:Int. J. Precis. Eng. Manuf.

Author:

Choi Kee-Bong,Lee Jaejong,Kim Geehong,Lim Hyungjun,Kwon Soongeun,Lee Sang-Chul

Funder

Korea Basic Science Institute

Ministry of Science and ICT

Publisher

Springer Science and Business Media LLC

Subject

Electrical and Electronic Engineering,Industrial and Manufacturing Engineering,Mechanical Engineering

Link

https://link.springer.com/content/pdf/10.1007/s12541-020-00358-0.pdf

Reference34 articles.

1. Chen, L.-S., Yen, J.-Y., Chen, J. J. H., Kuo, F.-C., Chen, M.-S., Chen, Y.-Y., et al. (2013). Precision tracking of a piezo-driven stage by charge feedback control. Precision Engineering,37(4), 793–804.

2. Choi, K.-B., Lee, J. J., & Hata, S. (2010). A piezo-driven compliant stage with double mechanical amplification mechanisms arranged in parallel. Sensors and Actuators A: Physical,161(1–2), 173–181.

3. Physik Instrumente. (2010). Micropositioning, nanopositioning, nanoautomation: Solutions for cutting-edge technologies. Karlsruhe/Palmbach, Germany: Physik Instrumente Catalogue.

4. Piezomechanik. (2010). First steps towards piezoaction. Munich, Germany: Piezo-mechanik GmbH Catalogue.

5. Piezomechanik. (2011). Low voltage co-fired multilayer stacks, rings and chips for actuation. Munich, Germany: Piezomechanik GmbH Catalogue.

Cited by 12 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Development of Wafer Bonding System for High Precision Bonding Alignment;International Journal of Precision Engineering and Manufacturing;2024-08-06

2. Analytical Modeling and Validation of New Prismatic Compliant Joints Based on Zero Poisson’s Ratio Lattice Structures;Journal of Mechanisms and Robotics;2024-05-10

3. Design of a New XY Compliant Parallel Manipulator Based on Deployable Spatial Monolithic Structure;IEEE/ASME Transactions on Mechatronics;2024

4. Concept Design of a New XY Compliant Parallel Manipulator With Spatial Configuration;2023 IEEE International Conference on Robotics and Automation (ICRA);2023-05-29

5. Design of a Control System for Precision Two-Dimensional Positioning Platform of Small Desktop Scanning Electron Microscope;2023 5th International Conference on Intelligent Control, Measurement and Signal Processing (ICMSP);2023-05-19