Design and stiffness modeling of a four-degree-of-freedom nanopositioning stage based on six-branched-chain compliant parallel mechanisms-Reference-Cited by-同舟云学术

Design and stiffness modeling of a four-degree-of-freedom nanopositioning stage based on six-branched-chain compliant parallel mechanisms

Published:2020-06-01 Issue:6 Volume:91 Page:065002
ISSN:0034-6748
Container-title:Review of Scientific Instruments
language:en
Short-container-title:Review of Scientific Instruments

Author:

Wang Ruizhou¹^ORCID,Wu Heng²,Wang Han¹,Zhang Xianmin³

Affiliation:

1. State Key Laboratory of Precision Electronic Manufacturing Technology and Equipment, Guangdong University of Technology, 510006 Guangzhou, China

2. Guangdong Provincial Key Laboratory of Cyber-Physical System, Guangdong University of Technology, 510006 Guangzhou, China

3. Guangdong Provincial Key Laboratory of Precision Equipment and Manufacture Technology, South China University of Technology, 510641 Guangzhou, China

Funder

National Natural Science Foundation of China

Publisher

AIP Publishing

Subject

Instrumentation

Link

http://aip.scitation.org/doi/pdf/10.1063/5.0008905

Reference30 articles.

1. Performance optimization of a fast tool servo for single-point diamond turning machines

2. Flexural-hinge guided motion nanopositioner stage for precision machining: finite element simulations

3. Modeling of flexure-hinge type lever mechanisms

4. Development of a Three Axis controlled Fast Tool Servo for Ultra Precision Machining (1st Report)

5. Development of a piezoelectrically actuated two-degree-of-freedom fast tool servo with decoupled motions for micro-/nanomachining

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