Structural, optical, and electrical characterization of gadolinium oxide films deposited by low-pressure metalorganic chemical vapor deposition
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1801157
Reference22 articles.
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3. High ε gate dielectrics Gd2O3 and Y2O3 for silicon
4. Epitaxial Cubic Gadolinium Oxide as a Dielectric for Gallium Arsenide Passivation
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