Solid-phase epitaxial regrowth of amorphous silicon containing helium bubbles
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.3009383
Reference31 articles.
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5. Studies of co-implanted helium and hydrogen with an intermediate annealing step for thermal splitting of bonded silicon to oxide-coated wafers
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