Depth analysis of buried iron disilicide formation by Fe ion implantation into Si
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.126048
Reference18 articles.
1. High-dose iron implantation into silicon and metals
2. Ion‐beam synthesis of a Si/β‐FeSi2/Si heterostructure
3. Ion beam synthesis of buried α‐FeSi2and β‐FeSi2layers
4. Investigation of ion beam synthesized FeSi2 and the α→β-phase transformation
5. Ion beam synthesis of α and β FeSi2 layers
Cited by 4 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Depth Resolved Structural Studies in Multilayers Using X-ray Standing Waves;Hyperfine Interactions;2005-01
2. Study about iron disilicide formation by high current ion implantation;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2002-11
3. Escape probability of low-energy electrons emitted in a heterogeneous solid source, and depth distribution analysis in conversion electron Mössbauer spectroscopy;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2001-04
4. Depth Resolved Structural Studies in Multilayers Using X-ray Standing Waves;IWNMS 2004
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