Soft‐x‐ray multilayer mirrors with laterally varying film thicknesses fabricated using laser‐beam‐scanning chemical vapor deposition-Reference-Cited by-同舟云学术

Soft‐x‐ray multilayer mirrors with laterally varying film thicknesses fabricated using laser‐beam‐scanning chemical vapor deposition

Published:1995-09 Issue:9 Volume:66 Page:4501-4506
ISSN:0034-6748
Container-title:Review of Scientific Instruments
language:en
Short-container-title:Review of Scientific Instruments

Author:

Yamada Yuka,Takeyama Shigeru,Mutoh Katsuhiko,Miyata Takeo

Publisher

AIP Publishing

Subject

Instrumentation

Link

http://aip.scitation.org/doi/pdf/10.1063/1.1145349

Reference19 articles.

1. Multilayers For X-Ray Optics

2. Fabrication and Evaluation of Mo-Si Multilayer Mirrors for Soft X-Rays

3. Fabrication and testing of large area multilayer coated x-ray optics

4. Tungsten-Carbon X-ray Multilayered Mirror Prepared by Photo-Chemical Vapor Deposition

5. Tungsten‐carbon multilayers for x‐ray optics prepared by ArF excimer‐laser‐induced chemical vapor deposition

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4. Metal oxide/silicon oxide multilayer with smooth interfaces produced by in situ controlled plasma-enhanced MOCVD;Thin Solid Films;2000-01

5. W/Si multilayers deposited by hot-filament MOCVD;Thin Solid Films;1999-01