Fabrication and Evaluation of Mo-Si Multilayer Mirrors for Soft X-Rays
Author:
Affiliation:
1. Tohoku University (Japan)
2. Shimadzu Corporation (Japan)
Publisher
SPIE
Cited by 8 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Research of optical and structural properties in Cu/Ti multilayer films;Vacuum;2005-10
2. A tracking ellipsometer of picometer sensitivity enabling 0.1% sputtering-rate monitoring of EUV nanometer multilayer fabrication;Thin Solid Films;2003-06
3. Soft‐x‐ray multilayer mirrors with laterally varying film thicknesses fabricated using laser‐beam‐scanning chemical vapor deposition;Review of Scientific Instruments;1995-09
4. Efficiency measurements at Mo/Si multilayer gratings and comparison with the model of radiating dipoles;Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment;1995-04
5. Characterization of tungsten-silicon multilayer mirrors fabricated using an ArF excimer laser;Laser and Ion Beam Modification of Materials;1994
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