Impact of laser anneal on NiPt silicide texture and chemical composition-Reference-Cited by-同舟云学术

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Impact of laser anneal on NiPt silicide texture and chemical composition

Published:2017-06-14 Issue:22 Volume:121 Page:225109
ISSN:0021-8979
Container-title:Journal of Applied Physics
language:en
Short-container-title:Journal of Applied Physics

Author:

Feautrier C.¹²^ORCID,Ozcan A. S.³,Lavoie C.⁴,Valery A.¹^ORCID,Beneyton R.¹,Borowiak C.¹,Clément L.¹,Pofelski A.¹,Salem B.²

Affiliation:

1. STMicroelectronics, 850 rue Jean Monnet, 38926 Crolles Cedex, France

2. Univ. Grenoble Alpes, CNRS, LTM, F-38000 Grenoble, France

3. IBM, 850 rue Jean Monnet, 38926 Crolles Cedex, France

4. IBM T. J. Watson Research Center, 1101 Kitchawan Road, Yorktown Heights, New York 10598, USA

Funder

Brookhaven National Laboratory (BNL)

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Link

http://aip.scitation.org/doi/am-pdf/10.1063/1.4985279

Reference47 articles.

1. Towards implementation of a nickel silicide process for CMOS technologies

2. Enhancement of thermal stability of NiSi films on (100)Si and (111)Si by Pt addition

3. An off-normal fibre-like texture in thin films on single-crystal substrates

4. Influence of Pt addition on the texture of NiSi on Si(001)

5. Correlation of Schottky-Barrier Height and Microstructure in the Epitaxial Ni Silicide on Si(111)

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1. Influence of the annealing schemes on the formation and stability of Ni(Pt)Si thin films: Partial, laser, total, and one-step annealings;Materials Science in Semiconductor Processing;2024-12

2. Experimental and numerical study of Si annealed by laser sources of the visible spectrum (red and blue wavelength);Vacuum;2023-09

3. Use of Nanosecond Laser Annealing for Thermally Stable Ni(GeSn) Alloys;IEEE Journal of the Electron Devices Society;2023

4. Tailoring the electronic properties of nickel silicide by interfacial modification;AIP Advances;2022-07-01

5. The influence of alloying on the phase formation sequence of ultra-thin nickel silicide films and on the inheritance of texture;Journal of Applied Physics;2018-05-14

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