Enhancement of thermal stability of NiSi films on (100)Si and (111)Si by Pt addition
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.124803
Reference12 articles.
1. Morphology and phase stability of TiSi2on Si
2. Analysis of resistance behavior in Ti- and Ni-salicided polysilicon films
3. Chemical bonding and charge redistribution: Valence band and core level correlations for the Ni/Si, Pd/Si, and Pt/Si systems
4. Formation of thin films of NiSi: Metastable structure, diffusion mechanisms in intermetallic compounds
5. Nucleation of a new phase from the interaction of two adjacent phases: Some silicides
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