Formation of modified Si/SiO2 interfaces with intrinsic low defect concentrations
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.369730
Reference34 articles.
1. Si→SiO2transformation: Interfacial structure and mechanism
2. X-ray scattering studies of the Si-SiO2interface
3. Si2pCore-Level Shifts at the Si(001)-SiO2Interface: A First-Principles Study
4. The localization and crystallographic dependence of Si suboxide species at the SiO2/Si interface
5. Microscopic structure of theSiO2/Si interface
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