The localization and crystallographic dependence of Si suboxide species at the SiO2/Si interface
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.338215
Reference23 articles.
1. (100) and (110) SiSiO2 interface studies by MeV ion backscattering
2. Studies of the Si‐SiO2interface by MeV ion channeling
3. Atomic structure at the (111) Si‐SiO2interface
4. Observation of an intermediate chemical state of silicon in the Si/SiO2interface by Auger sputter profiling
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