Role of the hydrogen plasma treatment in layer-by-layer deposition of microcrystalline silicon
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.120324
Reference12 articles.
1. On the Way Towards High Efficiency Thin Film Silicon Solar Cells by the “Micromorph” Concept
2. Control of silicon network structure in plasma deposition
3. Growth of Amorphous and Crystalline Silicon by HR-CVD (Hydrogen Radical Enhanced CVD)
4. Roles of Atomic Hydrogen in Chemical Annealing
5. Formation kinetics and control of microcrystallite in μc-Si:H from glow discharge plasma
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