Hydrogenated amorphous silicon produced by laser induced chemical vapor deposition of silane
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.94324
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1. Recent advances in amorphous silicon solar cells
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4. Properties of amorphous hydrogenated silicon, with special emphasis on preparation by sputtering
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