Dependence of the absorption of pulsed CO2‐laser radiation by silane on wavenumber, fluence, pulse duration, temperature, optical path length, and pressure of absorbing and nonabsorbing gases
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.359293
Reference43 articles.
1. Hydrogenated amorphous silicon growth by CO2laser photodissociation of silane
2. Hydrogenated amorphous silicon produced by laser induced chemical vapor deposition of silane
3. Investigation of the mechanism of CO2 laser driven production of ultrafine sinterable (Si3N4 and SiC) powders
4. PLASMA ENHANCED CVD OF AMORPHOUS HYDROGENATED SILICON INVESTIGATED BY OPTICAL DIAGNOSTICS
Cited by 2 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Nonlinear effects of laser-plasma interaction on melt-surface temperature;Journal of Physics D: Applied Physics;1999-01-01
2. The absorption of pulsed CO2-laser radiation by tetrafluorosilane at various wavenumbers, fluences, pulse durations, temperatures, optical path lengths and pressures of absorbing and non-absorbing gases;Applied Physics B Lasers and Optics;1996-02
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