Laser-induced chemical vapor deposition of nanostructured silicon carbonitride thin films
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.366669
Reference31 articles.
1. Sinterable Ceramic Powders from Laser-Driven Reactions: I, Process Description and Modeling
2. Sinterable Ceramic Powders from Laser-Driven Reactions: II, Powder Characteristics and Process Variables
3. Laser Vapor Phase Synthesis of Submicron Silicon and Silicon Nitride Powders from Halogenated Silanes
4. Laser-Chemical Vapor Precipitation of Submierometer Silicon and Silicon Nitride Powders from Chlorinated Silanes
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