Author:
Haarahiltunen A.,Savin H.,Yli-Koski M.,Talvitie H.,Sinkkonen J.
Subject
General Physics and Astronomy
Reference13 articles.
1. Modeling of Competitive Gettering of Iron in Silicon Integrated Circuit Technology
2. Gettering in silicon photovoltaics: current state and future perspectives
3. S. Nadahara, H. Tsunoda, M. Shiozaki, M. Watanabe, and K. Yamabe, in Defects in Silicon II, Proceedings of the Second Symposium on Defects in Silicon, Washington, DC, edited by W. M. Bullis and U. Gosele (Electrochemical Society, Pennington, NJ, 1991), pp. 667–674.
4. Study of Gettering Mechanisms in Silicon: Competitive Gettering between Phosphorus Diffusion Gettering and Other Gettering Sites
5. High concentration in-diffusion of phosphorus in Si from a spray-on source
Cited by
47 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献