Cubic crystalline erbium oxide growth on GaN(0001) by atomic layer deposition-Reference-Cited by-同舟云学术

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Cubic crystalline erbium oxide growth on GaN(0001) by atomic layer deposition

Published:2017-12-07 Issue:21 Volume:122 Page:215302
ISSN:0021-8979
Container-title:Journal of Applied Physics
language:en
Short-container-title:Journal of Applied Physics

Author:

Chen Pei-Yu¹,Posadas Agham B.²,Kwon Sunah³,Wang Qingxiao³,Kim Moon J.³,Demkov Alexander A.²,Ekerdt John G.¹

Affiliation:

1. Department of Chemical Engineering, The University of Texas at Austin, Austin, Texas 78712, USA

2. Department of Physics, The University of Texas at Austin, Austin, Texas 78712, USA

3. Department of Materials Science and Engineering, The University of Texas at Dallas, Richardson, Texas 75080, USA

Funder

National Science Foundation

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Link

http://aip.scitation.org/doi/am-pdf/10.1063/1.4999342

Reference68 articles.

1. Quantum-mechanical modeling of electron tunneling current from the inversion layer of ultra-thin-oxide nMOSFET's

2. Device scaling limits of Si MOSFETs and their application dependencies

3. High-k/Ge MOSFETs for future nanoelectronics

4. Nanometre-scale electronics with III–V compound semiconductors

5. Electronic surface and dielectric interface states on GaN and AlGaN

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1. Exploration of microstructural, chemical states and electrical features of the Au/Er2O3/n-GaN MIS diode with a Er2O3 interlayer;Materials Science and Engineering: B;2023-12

2. Recent Developments and Prospects of Fully Recessed MIS Gate Structures for GaN on Si Power Transistors;Energies;2023-03-24

3. Thermal atomic layer deposition of Er₂O₃ films from a volatile, thermally stable enaminolate precursor;Dalton Transactions;2023

4. Comprehensive investigation of Er2O3 thin films grown with different ALD approaches;Surfaces and Interfaces;2022-11

5. Theoretical study of GaN (0001) surface reconstructions and La and Ga adatoms under N- and Ga-rich conditions;Physical Review Materials;2021-04-05

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