High‐resolution transmission electron microscopy study of solid phase crystallized silicon thin films on SiO2: Crystal growth and defects formation
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.359359
Reference19 articles.
1. Control of Si Solid Phase Nucleation by Surface Steps for High-Performance Thin-Film Transistors
2. Structure and crystallization of low‐pressure chemical vapor deposited silicon films using Si2H6 gas
3. High-mobility poly-Si thin-film transistors fabricated by a novel excimer laser crystallization method
4. Pulsed laser crystallization and doping for the fabrication of high-quality poly-Si TFTs
5. Grain growth kinetics during ion beam irradiation of chemical vapor deposited amorphous silicon
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