Fabrication of polycrystalline silicon films by Al-induced crystallization of silicon-rich oxide films
Author:
Affiliation:
1. Department of Physics; Kangwon National University; 1 Gangwondaehak-gil Chuncheon, Gangwon-do 24341 Korea
Publisher
Wiley
Subject
Condensed Matter Physics,General Materials Science
Reference18 articles.
1. Low temperature poly-Si thin-film transistor fabrication by metal-induced lateral crystallization
2. 8% Efficient thin-film polycrystalline-silicon solar cells based on aluminum- induced crystallization and thermal CVD
3. High-quality polycrystalline silicon thin film prepared by a solid phase crystallization method
4. Polycrystalline silicon thin-film solar cells: Status and perspectives
5. Aluminum-induced crystallization of amorphous silicon on glass substrates above and below the eutectic temperature
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1. Formation of silicon nanocomposites by annealing of (SiOx/Sm)n multilayers: luminescence, Raman and FTIR studies;Applied Nanoscience;2023-06-07
2. Kinetics of gold-induced layer exchange crystallization of amorphous silicon suboxide films: Experimental and theoretical study;Journal of Alloys and Compounds;2023-04
3. Polycrystalline Silicon Thin Films for Solar Cells via Metal-Induced Layer Exchange Crystallization;Coatings;2022-12-08
4. Fabrication of polycrystalline silicon thin films by gold-induced crystallization of amorphous silicon suboxide;Vacuum;2021-10
5. Fabrication of polycrystalline silicon thin films from a-SiOx via the inverted aluminum-induced layer exchange process;Materials Letters;2020-02
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